Poly Silicon
Element |
Concentratio (ppm wt) |
Element |
Concentratio (ppm wt) |
Li |
< 0.001 |
Ag |
< 0.01 |
Be |
< 0.001 |
Cd |
< 0.05 |
B |
0.22 |
In |
< 0.01 |
F |
< 1 |
Sn |
< 0.01 |
Na |
< 0.01 |
Sb |
< 0.01 |
Mg |
< 0.005 |
Te |
< 0.01 |
Al |
0.06 |
I |
< 0.01 |
Si |
Matrix |
Cs |
< 0.001 |
P |
0.12 |
Ba |
< 0.01 |
S |
< 0.02 |
La |
< 0.01 |
Cl |
< 0.05 |
Ce |
< 0.005 |
K |
< 0.05 |
Pr |
< 0.005 |
Ca |
< 0.05 |
Nd |
< 0.005 |
Sc |
< 0.001 |
Sm |
< 0.005 |
Ti |
< 0.005 |
Eu |
< 0.005 |
V |
< 0.005 |
Gd |
< 0.005 |
Cr |
< 0.01 |
Tb |
< 0.005 |
Mn |
< 0.005 |
Dy |
< 0.005 |
Fe |
< 0.01 |
Ho |
< 0.005 |
Co |
< 0.005 |
Er |
< 0.005 |
Ni |
< 0.01 |
Tm |
< 0.005 |
Cu |
< 0.01 |
Yb |
< 0.005 |
Zn |
< 0.05 |
Lu |
< 0.005 |
Ga |
< 0.05 |
Hf |
< 0.01 |
Ge |
0.1 |
Ta |
- |
As |
< 0.01 |
W |
< 0.05 |
Se |
< 0.01 |
Re |
< 0.01 |
Br |
< 0.01 |
Os |
< 0.01 |
Rb |
< 0.01 |
Ir |
< 0.01 |
Sr |
< 0.01 |
Pt |
< 0.01 |
Y |
< 0.01 |
Au |
< 0.1 |
Zr |
< 0.01 |
Hg |
< 0.01 |
Nb |
< 0.01 |
Tl |
< 0.01 |
Mo |
< 0.05 |
Pb |
< 0.01 |
Ru |
< 0.01 |
Bi |
< 0.01 |
Rh |
< 0.01 |
Th |
< 0.005 |
Pd |
< 0.01 |
U |
< 0.005 |
Note : Analysis conducted according to SEMI PV1-0309
- S by SIMS.
Purity = 99.99995%